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	Proton     energy: 200 keV - 4 MeV,     current: up to 200 eµA,     brightness: 8-16 Amp(rad)-2m-2eV-1Helium     energy: 200 keV - 6 MeV,     current: up to 40 eµAOther ions: e.g. B, C, O, S, Si, Cu etc.     energy: 200 keV ~ 10 MeV (depending on charge state),     current: up to 10-50 eµA (depending on ion species)Terminal voltage stability: ± 30 V / 4 hrs (slits stabilization)Terminal voltage ripple: 25 VRMS |