Institute for Nuclear Research

Secondary neutral-particle/ion mass spectrometer (SNMS/SIMS)

	Category	Measuring system
Type	Spect
Organizational unit	Laboratory of Materials Science
Person in charge	Dr. Kálmán Vad
Üzembentartó	Atomki-University of Debrecen
Application	Research, Service
Value	high value
Research topics	Physics of thin films and surface/interface layers Nanoanyagok szintézise és karakterizálása

Abstract

The SNMS/SIMS-XPS assembly contains a secondary neutral mass spectrometer, a secondary ion mass spectrometer and an X-ray photoelectron spectrometer (XPS) with a common vacuum system. This arrangement enables the analysis of samples in ultra-high vacuum to be carried out without opening the vacuum chamber during the sample transfer. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution. n

Description

**Rövid leírás**

The SNMS/SIMS-XPS assembly contains a secondary neutral mass spectrometer, a secondary ion mass spectrometer and an X-ray photoelectron spectrometer (XPS) with a common vacuum system. This arrangement enables the analysis of samples in ultra-high vacuum to be carried out without opening the vacuum chamber during the sample transfer. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution.

**Műszaki paraméterek**
Plasma	Ar, Ne, Kr, Xe
Sputtering speed	~0,1 nm/s
Ion energy	100 eV - 2 keV
Mass spectrometer	Balzers QMG 422
Accessable mass region	0 - 340 amu
Sensitivity	1 ppm
Depth resolution	1-2 nm
Sample holder	heatable upto 600 oC
	coolable upto -180 oC
	x - y scanning possibility