Institute for Nuclear Research
MTA Certificate of Research Excellence

Production of micromechanical components

Core competence Plasma and ion-beam technologies
Method Proton-Beam Writing (PBW)
Contact person
Szakmai leírás

MeV energy protons can be focused down to micrometer lateral resolution in the scanning ion microprobe facility. Proton Beam Writing (PBW) is a 3-dimensional direct write lithography method.


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