APHA-code P14893
Authors Bettiol A. A.,  Rajta I.,  Teo E. J.,  van Kan J. A.,  Watt F.
Title Proton beam micromachining: electron emission from SU-8 resist during ion beam irradiation.
Megjelenés helye Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 190 (2002) 154
Impact factor 1.158
Megnézem DOI   Hivatkozások (7)