A Secondary Neutral Mass Spectrometer (SNMS, Specs GmbH) are used for depth profiling of layered structures and for detailed impurity analysis. It is possible to study conducting and insulating materials, depth profiling of scientific and industrial samples, identify impurity on the surface and inside of the samples structure. The controlled sputter removal of the surface by low energy ion bombardment , minimal matrix effects and no influence due to preferential sputtering allow very accurate material analysis.

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