X-ray Photoelectron Spectroscopy (XPS) is one of the most powerful, non-destructive surface analytical method. XPS measurement provides qualitative elemental analysis, quantitative composition and determination of chemical state. The information is originated from the topmost 6-10 nm slab of the sample. Sample is illuminated by X-ray source, thus excited photoelectrons are detected by an energy analyzer. The achievable lateral resolution is about a few square millimeters.

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