APHA Szerző - Kárpáti T.3

P22861

 MEMS-compatible hard coating technique of moveable 3D silicon microstructures.

Szerzők Fekete Z.,  Fürjes P.,  Kárpáti T.,  Gál G. A. B.,  Rajta I.
Megjelenés helye Materials Science Forum 659 (2010) 147
Jelleg Scientific paper, proceedings
Témák Developm. of Instr. and Methods
Materials Science and Analytics
Linkek DOI

Szerzői Táblázat

Total Headed by ATOMKI under name
of the author
Part of the author Part of the author & ATOMKI
Publications:100.0670
SCIPublications:0000
Cited publications:0000
Non-locally cited publications:0000
Cited SCIpublications:0000
Non-locally cited SCIpublications:0000
SCICited publications:0000
Non-locally SCIcited publications:0000
SCICited SCIpublications:0000
Non-locally SCIcited SCIpublications:0000
Citations:0000
Non-local citations:0000
SCICitations:0000
Non-local SCIcitations:0000
Impact~0:000.0670
Averaged impact:000.0670
SCIaveraged impact:0000
Citational effectivity:0000
Non-local citational effectivity:0000
SCIcitational effectivity:0000
Non-local SCIcitational effectivity:0000
Publications, n:4000
SCIPublications, n:0000
Cited publications, n:0000
Non-locally cited publications, n:0000
Cited SCIpublications, n:0000
Non-locally cited SCIpublications, n:0000
SCICited publications, n:0000
Non-locally SCIcited publications, n:0000
SCICited SCIpublications, n:0000
Non-locally SCIcited SCIpublications, n:0000
z-index:0000