Production of micromechanical components

Kompetencia terület Plasma and ion-beam technologies
Módszer Proton-Beam Writing (PBW)
Kapcsolattartó
Szakmai leírás

MeV energy protons can be focused down to micrometer lateral resolution in the scanning ion microprobe facility. Proton Beam Writing (PBW) is a 3-dimensional direct write lithography method.

 

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